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YAMATAKE Sensor & Control Systems Wet Process Sensors

Wet Process Sensors

Type
Model :
Wet Process Sensors
Screw diameter for both ends:
Applicable fluid:
Features

HPF-D040

HPF-T032

HPF-D033-D027

HPF-D040Features and Benefits

HPF-T032

HPA SeriesHigh Performance/General Purpose

These fiber cables are used exclusively for liquid level detection in chemical baths, cleaning baths, and spin coaters/developers. The liquid surface is detected by contact of the sensor tip with the liquid surface.The proprietary tip structure prevents liquid buildup so stable detection is maintained. Their bend radius is less than all known competitors at 30 or 40mm and they have an operating temperature range of -30 to 105 degree C. Cable length is 2 meters.

HPF-D040

HPF-T032

HPF-D033-D027

Sealed, Chemically Resistant Materials – 13mm circular sensor pancake lays on bottom of semiconductor wet process tool and detects liquid leak or spill by refraction light principle

Inherently Safe – Optical light is used from a remotely mounted fiberoptic amplifier

Sealed, chemically resistant materials – PFA housing and bracket with 316SS mounting gromme

Quick Detection minimizing environmental impact and messy cleanup – typically, 1ml of liquid contact with the optical focal point will trigger the signal change. Sensitivity is adjustable to some extent by the amplifier used

Fail Safe Design – Sensing light is conducted from amplifier emitter, reflected off pan, then returned to amplifier receiver. When liquid is present or cable breaks, amplifier changes state

Floating Head Detection Capability – If the sensing head becomes unattached from the pan, the amplifier will change state. There is no reflective surface included in the head design

Fail Safe Design (Semi S2 Compliant)

Chemically Resistant Materials

Pipe Size 1/8″ to 1/2″ (3-13mm)

Uses Multiple Beam Array – High Contrast Level

Inherently Safe – Optical Light

Application